The Proceedings of the 5th China and International Young Scientist Terahertz Conference highlight the important research and technological progresses on terahertz signal sources, terahertz detection, terahertz biophysics, terahertz transmission, terahertz regulation, terahertz device and materials, terahertz communication, terahertz radar and imaging, terahertz spectroscopy and biotechnology, and the intersection and application of terahertz-related disciplines.